A new laser-based instrument will measure vibrations in tiny devices with picometre precision—that’s trillionths of a metre—at frequencies up to 1.2 billion cycles per second. As engineers shrink sensors, filters, and transducers down to micro- and nanoscale, these components vibrate at extremely high frequencies. Measuring those vibrations is essential for designing better devices, but existing techniques either cannot reach such small displacements or physically touch the device and distort the reading. This ultra-high frequency laser vibrometer solves that problem: it bounces a laser off any surface with more than 4% reflectivity and maps the displacement or velocity field without contact. The equipment will support the development of surface acoustic wave devices used in biosensing and digital signal processing, ultrasound transducers for medical imaging, and micromachined sonotrodes for ultrasonic welding. It will also help characterise next-generation nano-electromechanical systems made from materials like graphene, which promise even higher resonant frequencies. Better measurement means better design optimisation, more accurate simulations, and fewer failed prototypes. The result could be cheaper, more sensitive medical diagnostics, faster signal processing in communications, and more reliable manufacturing processes—all built on the ability to see what happens when tiny things move very fast.
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The past decade has seen an explosion in the number of high frequency micro-manufactured devices being developed. Well-known examples include RF-Micro-Electro-Mechanical-Systems (RF-MEMS), Surface Acoustic Wave (SAW) devices for applications in biosensing, SAW devices for applications in digital signal processing (DSP), ultrasound transducers for applications in medical imaging and finally micromachined sonotrodes used in ultrasonic welding technology. This growth will continue as Nano-Electro-Mechanical (NEMS) become more prevalent due to developments in fabrication techniques and materials. For example, the unique electrical and mechanical properties offered by graphene will see devices developed with ever increasing resonant frequencies. An essential part in the development of high frequency devices is the measurement of their dynamic behaviour. This includes natural frequencies, modeshapes, displacement fields and support loss mechanisms. This is critical for design optimisation, optimising process steps and validating any model or simulation. The measurement options available for high frequency systems where displacements may be of the order of picometres are extremely limited and only a few options exist. Contacting characterisation techniques e.g. AFM, load the device and therefore prevent a true accurate measurement of its dynamics. High frequency laser vibrometry presents the only non-invasive measurement option. We aim to purchase a ultra-high frequency laser vibrometer to enable dynamic characterisation of high frequency microsystems. This equipment will allow the displacement or velocity field of any structure will greater than 4% reflectivity to be measured with picometre resolution and up to a frequency of 1.2 GHz. It will therefore be ideal for characterising SAW devices, high frequency N/MEMS sensors and RF MEMS.
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